RTP Anealing Furnace NBD-HR1200-110IT

RTP(Rapid Thermal Processing Furnace),patent product, rising speed rate up to 500℃/S. And at the end of the sintering process, the sample is taken out at high temperature directly, to achieve the fastest cooling in the physical state.

The chamber adopts a unique intake structure, The inner tube is gas inlet, the outer tube is gas outlet.This kind structure make reaction atmosphere expposed in the processing sample fully and constantly.

It is perfect helper for growing large-size two-dimensional graphene by CVD method.

Temperature measurement devices contact with the sample directly. it ensure the accuracy of the sample temperature.

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[one_half last=”no” spacing=”yes” center_content=”no” hide_on_mobile=”no” background_color=”” background_image=”” background_repeat=”no-repeat” background_position=”left top” hover_type=”none” link=”” border_position=”all” border_size=”0px” border_color=”” border_style=”” padding=”” margin_top=”” margin_bottom=”” animation_type=”” animation_direction=”” animation_speed=”0.1″ animation_offset=”” class=”” id=””][modal name=”Contactus” title=”” size=”small” background=”” border_color=”” show_footer=”yes” class=”” id=””]

[/modal][button link=”” color=”default” size=”” stretch=”” type=”” shape=”” target=”_self” title=”” gradient_colors=”#0caaf9|” gradient_hover_colors=”|” accent_color=”” accent_hover_color=”” bevel_color=”” border_width=”” icon=”fa-commenting-o” icon_position=”left” icon_divider=”no” modal=”Contactus” animation_type=”0″ animation_direction=”left” animation_speed=”1″ animation_offset=”” alignment=”” class=”” id=””]Inquiry us[/button][/one_half][one_half last=”yes” spacing=”yes” center_content=”no” hide_on_mobile=”no” background_color=”” background_image=”” background_repeat=”no-repeat” background_position=”left top” hover_type=”none” link=”” border_position=”all” border_size=”0px” border_color=”” border_style=”” padding=”” margin_top=”” margin_bottom=”” animation_type=”” animation_direction=”” animation_speed=”0.1″ animation_offset=”” class=”” id=””][button link=”mailto:nbd@nbdkj.com” color=”default” size=”” stretch=”” type=”” shape=”” target=”_self” title=”” gradient_colors=”#0caaf9|” gradient_hover_colors=”|” accent_color=”” accent_hover_color=”” bevel_color=”” border_width=”” icon=”fa-envelope-o” icon_position=”left” icon_divider=”no” modal=”” animation_type=”0″ animation_direction=”left” animation_speed=”1″ animation_offset=”” alignment=”” class=”” id=””]Email Us[/button][/one_half][fusion_text]
[one_full last=”yes” spacing=”yes” center_content=”no” hide_on_mobile=”no” background_color=”” background_image=”” background_repeat=”no-repeat” background_position=”left top” hover_type=”none” link=”” border_position=”all” border_size=”0px” border_color=”” border_style=”” padding=”” margin_top=”” margin_bottom=”” animation_type=”” animation_direction=”” animation_speed=”0.1″ animation_offset=”” class=”” id=””][title size=”1″ content_align=”left” style_type=”default” sep_color=”” margin_top=”” margin_bottom=”” class=”” id=””]RTP Tube Furnace Introduction[/title][fusion_text]RTP(Rapid Thermal Processing Furnace),patent product, rising speed rate up to 500℃/S. And at the end of the sintering process, the sample is taken out at high temperature directly, to achieve the fastest cooling in the physical state.

The chamber adopts a unique intake structure, The inner tube is gas inlet, the outer tube is gas outlet.This kind structure make reaction atmosphere expposed in the processing sample fully and constantly.

It is perfect helper for growing large-size two-dimensional graphene by CVD method.

Temperature measurement devices contact with the sample directly. it ensure the accuracy of the sample temperature.[/fusion_text][/one_full][one_full last=”yes” spacing=”yes” center_content=”no” hide_on_mobile=”no” background_color=”” background_image=”” background_repeat=”no-repeat” background_position=”left top” hover_type=”none” link=”” border_position=”all” border_size=”0px” border_color=”” border_style=”” padding=”” margin_top=”” margin_bottom=”” animation_type=”” animation_direction=”” animation_speed=”0.1″ animation_offset=”” class=”” id=””][title size=”1″ content_align=”left” style_type=”default” sep_color=”” margin_top=”” margin_bottom=”” class=”” id=””]RTP tube furnace for CVD application[/title][checklist icon=”fa-check-square-o” iconcolor=”#aaaaaa” circle=”no” circlecolor=”” size=”13px” class=”” id=””][li_item icon=””]RTA;[/li_item][li_item icon=””]Graphene and other vapor deposition, epitaxial growth of carbon nanotubes, etc.[/li_item][li_item icon=””]RTO; RTN;[/li_item][li_item icon=””]Silicidation;[/li_item][li_item icon=””]Diffusion[/li_item][li_item icon=””]Implant Annealing[/li_item][li_item icon=””]Contact Alloying[/li_item][li_item icon=””]Crystallization and Densification[/li_item][/checklist][/one_full][one_full last=”yes” spacing=”yes” center_content=”no” hide_on_mobile=”no” background_color=”” background_image=”” background_repeat=”no-repeat” background_position=”left top” hover_type=”none” link=”” border_position=”all” border_size=”0px” border_color=”” border_style=”” padding=”” margin_top=”” margin_bottom=”” animation_type=”” animation_direction=”” animation_speed=”0.1″ animation_offset=”” class=”” id=””][title size=”1″ content_align=”left” style_type=”default” sep_color=”” margin_top=”” margin_bottom=”” class=”” id=””]RTP tube furnace for CVD Main Features[/title][checklist icon=”fa-check-square-o” iconcolor=”#aaaaaa” circle=”no” circlecolor=”” size=”13px” class=”” id=””][li_item icon=””]Max speed of temperature rising is 500℃/S, Max speed of temperature decreasing is 100℃/S;[/li_item][li_item icon=””]Double layer tube structure, the smaple exposes in the atmosphere much more constantly;[/li_item][li_item icon=””]Measure the temperature of the sample surface directly, more accuracy;[/li_item][li_item icon=””]The chamber moves from one side to another side according to users’ preset, This will meet more lab applications;[/li_item][li_item icon=””]rich expansion interface, to meet the needs of various types of tests.[/li_item][/checklist][/one_full][one_full last=”yes” spacing=”yes” center_content=”no” hide_on_mobile=”no” background_color=”” background_image=”” background_repeat=”no-repeat” background_position=”left top” hover_type=”none” link=”” border_position=”all” border_size=”0px” border_color=”” border_style=”” padding=”” margin_top=”” margin_bottom=”” animation_type=”” animation_direction=”” animation_speed=”0.1″ animation_offset=”” class=”” id=””][title size=”1″ content_align=”left” style_type=”default” sep_color=”” margin_top=”” margin_bottom=”” class=”” id=””]RTP tube furnace for CVD Parameters[/title][fusion_text]

  • Model:NBD-HR1100-110IT-170
  • Max temperature:1200℃
  • Max speed of temp rising: 500℃/s
  • Inner tube diameter: 103mm
  • Size of processed wafer: 4inch
  • Length of Heating area:200mm
  • Length of constand temperature zone: 120mm
  • Size: L800xH540xW750mm
  • Power: AC380V,15KW
  • Weight:40kg

[/fusion_text][/one_full][one_full last=”yes” spacing=”yes” center_content=”no” hide_on_mobile=”no” background_color=”” background_image=”” background_repeat=”no-repeat” background_position=”left top” hover_type=”none” link=”” border_position=”all” border_size=”0px” border_color=”” border_style=”” padding=”” margin_top=”” margin_bottom=”” animation_type=”” animation_direction=”” animation_speed=”0.1″ animation_offset=”” class=”” id=””][title size=”1″ content_align=”left” style_type=”default” sep_color=”” margin_top=”” margin_bottom=”” class=”” id=””]RTP tube furnace for CVD Spare Parts List[/title][fusion_text]

inner tube of RTP tube furnace: Φ80*450mm

  • Heating Element of RTP tube Furnace: 6pcs 2KW Infrared lamps
  • O-ring Of RTP tube furnace: Φ115×5.6mm 1pcsΦ108×5.6mm 2pcsΦ78×5.3mm 2pcsΦ48×5.3mm 1pcs
  • Thermocouple of RTP tube furnace: S type

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