CVD Atmosphere Tube Furnace NBD-T1700-60IT-D3ZH

1700℃ CVD vacuum tube furnace is widely used in kinds of CVD experiments which reaction temperature is round 1650 ℃. It is also used for vacuum sintering, vacuum sintering under atmosphere protection, nano materials preparation, battery negative and postive material preparation and other multiple research fields.

 

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CVD Atmosphere Tube Furnace Introduction

1700℃ CVD tube furnace system is widely used in kinds of CVD experiments which reaction temperature is round 1650 ℃. It is also used for vacuum sintering, vacuum sintering under atmosphere protection, nano materials preparation, Li-battery material preparation and other multiple research fields.

The ultimate vacuum degree of this system is 5-10 pa. If require other vacuum degree, it need to choose different vacuum device.

Gas mixing system of this system is three channel mass flow meter.

Main part of CVD Atmosphere Tube Furnace system

  1. 1700℃ single zone tube furnace
  2. Three channel mass flow meter
  3. NBD-4C vacuum pump

1700 single zone three channel gas CVD tube furnace system technical data:

1 Product name 1700℃ single zone three channel gas CVD system
2 Model NBD-T1700-50IT-D3ZH
3 NBD-T1700-60IT-D3ZH
4

 

NBD-T1700-80IT-D3FH
5 Chamber type closed
6 Displaying mode LED displaying
7 Chamber material Imported alumina fiber
8 Heating element MoSi2 rod
9 Max. Temperature 1700℃
10 Working temperature ≤1650℃
11 Heating rate ≤20℃(adviced:10℃/min)
12 Heating zone single
13 Length of temperature zone 240mm
14 Length of constant temperature zone 120mm
15 Tube material High purity alumina
16 Tube diameter 50mm
17 60mm
18 80mm
19 Tube length 1000mm
20 Sealing method high vacuum stainless steel flange
21 Gas tightness Gas tightness of vacuum flange and quartz tube can reach to 4.03×10-3Pa.
22 Controlling mode smart PID multiple segments programmable controlling
23 Accuracy ±1℃
24 Temperature curve multiple segments“time-temperature curve”
25 Presetting curve 10pcs
26 Over temperature alarm yes
27 Over-current protection yes
28 broken thermocouple prompt yes
29 Thermocouple B type
30 Certification CE
31 voltage 220V 50Hz~60Hz
32 power 4 KW
33 Gas channel three
34 Flow meter Mass flow meter
35 A channel range 10~100ml/min
36 B channel range 16~160ml/min
37 C channel range 25~250ml/min
38 Pressure of gas channel -0.1~0.15 MPa
39 Vacuum degree 5~10Pa(If require other vacuum degree, it need to choose different vacuum device)
40 Connection of pump pipe KF16 stainless steel bellows, KF16 quick clamp,KF16 flapper valve
41 Vacuum gauge standard mechanical vacuum gauge, optional electronic vacuum gauge
42 Warranty 12 months limited warranty
43 Package Plywood case
44 Standard accessories Alumina tube, Vacuum Flange, Tube Block, O-ring, protective goves, crucible tongs, manual book, PTFE hose, stainless steel quick clamp,stainless steel bellows , KF adapter, 5mm  Allen wrench
45 Dimensions 700mmx600mmx1105mm

其他信息

Product name

1200℃ CVD Atmosphere Tube Furnace

Model

NBD-O1200-80IT

Dimensions

600×610×470(mm)

Tube size

Φ80*1000

Working temperature

1150℃

Length of temperature zone

440mm(length uniform temperature zone: 260mm)

Heating rate

Advice10℃/min

Heating elements

imported alloy heating wire

Chamber material

Imported alumina fiber Refractory insulation

Controlling accuracy

±1℃

Chamber type

Horizontal type

Control type

7 “color touch-screen control, Intelligent Fuzzy PID Control

Max. temperature

1200℃

Heating temperature zone

single

Temperature curve

preset 15 curves, every curve can set 30 segments ”time-temperature” curve

Operating interface

English graphical interface, true color touch screen input, interactive mode

Temperature curve record

Real-time monitoring and dynamic real show “Time – temperature curve”

Thermalcouple

K type

Protection settings

Broken thermocouple reminder, Over-current protection, Broken thermocouple reminder

Standard

CE appliance

power

220V 50Hz 4KW

Accessories

One pcs quartz tube, vacuum Flange 1set, a pair of protective gloves, O-ring, 1pcs furnace hook, manual book.

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